Series in Automation - Vol. 4
INTELLIGENT MODELING, DIAGNOSIS AND CONTROL OF MANUFACTURING PROCESSES
edited by B-T Chu & S-S Chen (University of North Carolina, Charlotte)
This volume demonstrates that the key to the modeling, diagnosis and control of the next generation manufacturing processes is to integrate knowledge-based systems with traditional techniques. An up-to-date study is given here of this relatively recent development.
The book is for those working primarily with traditional techniques and those working in the knowledge-based systems field. Both sets of readers will find it to be a source of many specific ideas about the integration of knowledge-based systems with traditional techniques, and carrying a wealth of useful references.
Contents:
- Manufacturing Diagnosis and Control: A Task-Specific
Approach (W F Punch III et al.)
- The Theory and Application of Diagnostic and Control Expert System Based on Plant Model (J Suzuki & M Iwamasa)
- Integrated Problem Solving for the Diagnosis of Interacting Process Malfunctions (J K McDowell & J F Davis)
- A Neural Network Model for Diagnostic Problem Solving (Y Peng & J A Reggia)
- Process Control System for VLSI Fabrication (E Sachs et al.)
- Development and Application of Equipment-Specific Process Models for Semiconductor Manufacturing (K-K Lin & C Spanos)
- Continuous Equipment Diagnosis Using Evidence Integration — An LPCVD Application (N H Chang & C Spanos)
- Equipment/Instrument Diagnosis with Continuous and Discrete Causal Relationship (B-T B Chu)
- Intelligent Control of Semiconductor Manufacturing Processes (S-S Chen)
- A Machine Learning Approach to Diagnosis and Control with Applications in Semiconductor Manufacturing (K B Irani et al.)
Readership: Computer scientists and engineers.
"This book can be taken as an introduction to the people who may not be familiar with these issues. It also provides some promotion to further research activities in this area."
Pixin Zhang
European Journal of Mechanics, 1994 |
| 272pp |
Pub. date: Aug 1992 |
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