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Advanced Series in Electrical and Computer Engineering - Vol. 13
SEMICONDUCTOR MANUFACTURING TECHNOLOGY
by Chue San Yoo (Former Associate Professor at Tamkang University & National Tsing Hua University, Taiwan)
This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.
Contents:
- Building Blocks for Integrated Circuits
- Thermal Oxidation
- Gas
Kinetics and Plasma Physics
- Chemical Vapor Deposition
- Plasma-Enhanced Chemical Vapor Deposition and Etching
- Pattern Transfer: Photolithography
- Pattern Generation
- Doping Technology
- Metallization and Silicidation
- Planarization and CMP Technology
- Copper and Low-k
Readership: Senior undergraduate and graduate students as well as researchers
and engineers in semiconductor industries.
| 484pp |
Pub. date: Mar 2008 |
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