SEMICONDUCTOR MANUFACTURING TECHNOLOGY
by Chue San Yoo (Former Associate Professor at Tamkang University & National Tsing Hua University, Taiwan)
Table of Contents (38k)
Preface (35k)
Chapter 1: Overview (612k)
Chapter 5: Chemical Vapor Deposition (968k)
Chapter 8: Pattern Generation (1,759k)
This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.
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