by Anjam Khursheed (National University of Singapore, Singapore)

This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself.

The book is aimed at scientists, engineers and graduate students whose research area or study in some way involves the scanning electron microscope and/or charged particle spectrometers. It can be used both as an introduction to these subjects and as a guide to more advanced topics about scanning electron microscope redesign.

• Introduction
• Conventional SEM Design
• Objective Lens Improvements
• Abberation Correction for SEM
• Electron Spectrometers and Filters
• Secondary Electron Spectrometers
• Auger Electron Spectrometers
• Backscattered Electron Spectrometers
• An Add-on Transmission Electron Energy Loss Spectrometer Attachment
• Full-Range Energy Spectrometer Designs
• A Multi-beam Spectra–Microscope Proposal